Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004689 | Thermal silicon etch | Rui Cheng, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick | 2021-05-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004689 | Thermal silicon etch | Rui Cheng, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick | 2021-05-11 |