Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049726 | Methods and systems for advanced ion control for etching processes | Qian Fu, Ying Wu, Qing Xu, John Drewery | 2021-06-29 |
| 11037784 | Amorphous carbon layer opening process | Ce Qin, Yisha Mao, Yansha Jin, Austin Casey Faucett | 2021-06-15 |
| 10943789 | Methods and systems for advanced ion control for etching processes | Qian Fu, Ying Wu, Qing Xu, John Drewery | 2021-03-09 |