Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119417 | Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s) | Amnon Manassen, Eran Amit | 2021-09-14 |
| 11101153 | Parameter-stable misregistration measurement amelioration in semiconductor devices | Vladimir Levinski, Sharon Aharon, Amnon Manassen | 2021-08-24 |