Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Jung-Min Oh, Kuntack Lee +1 more | 2021-04-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Jung-Min Oh, Kuntack Lee +1 more | 2021-04-27 |