Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194258 | Method and apparatus for determining a fingerprint of a performance parameter | Léon Maria Albertus Van Der Logt, Bart Peter Bert Segers, Carlo Cornelis Maria Luijten, Frank Staals | 2021-12-07 |
| 11181829 | Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process | Cyrus E. Tabery, Hakki Ergün Cekli, Chenxi Lin | 2021-11-23 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Chenxi Lin, Dag Sonntag, Hakki Ergün Cekli +9 more | 2021-08-10 |