Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069535 | Atomic layer etch of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Anand Chandrashekar, Teh-Tien Su, Wenbing Yang +2 more | 2021-07-20 |
| 11011379 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji, Jun Qian +1 more | 2021-05-18 |