Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092902 | Method and apparatus for detecting substrate surface variations | Johannes F. M. D'Achard Van Enschut, Tamara Druzhinina, Nitish Kumar, Sarathi ROY, Yang-Shan Huang +3 more | 2021-08-17 |
| 10983361 | Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus | Simon Gijsbert Josephus Mathijssen, Stefan Michael Bruno Bäumer | 2021-04-20 |
| 10976265 | Optical detector | Richard Quintanilha | 2021-04-13 |