Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211264 | Substrate processing apparatus and substrate processing method | Michinori IWAO | 2021-12-28 |
| 11101146 | Substrate processing apparatus | Nobuaki OKITA, Takayuki Nishida | 2021-08-24 |
| 10998220 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Hiroaki Ishii | 2021-05-04 |
| 10964556 | Substrate processing apparatus, substrate processing system, and substrate processing method | Mitsukazu Takahashi | 2021-03-30 |
| 10910240 | Substrate processing device | — | 2021-02-02 |