Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964556 | Substrate processing apparatus, substrate processing system, and substrate processing method | Ryo MURAMOTO | 2021-03-30 |
| 10910247 | Substrate container, load port apparatus, and substrate treating apparatus | Kazuhiro Honsho, Akito Hatano, Koji Hashimoto | 2021-02-02 |