Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2021-07-27 |
| 10910247 | Substrate container, load port apparatus, and substrate treating apparatus | Kazuhiro Honsho, Mitsukazu Takahashi, Koji Hashimoto | 2021-02-02 |