Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akito Hatano, Motoyuki Shimai | 2021-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akito Hatano, Motoyuki Shimai | 2021-07-27 |