Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114302 | Substrate processing apparatus and substrate processing method | Shotaro Tsuda, Nobuyasu Hiraoka, Takayuki Nishida | 2021-09-07 |
| 11101146 | Substrate processing apparatus | Ryo MURAMOTO, Takayuki Nishida | 2021-08-24 |