Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114302 | Substrate processing apparatus and substrate processing method | Shotaro Tsuda, Nobuaki OKITA, Takayuki Nishida | 2021-09-07 |
| 10892174 | Substrate cleaning brush and substrate cleaning apparatus | Wataru Yano, Takashi Shinohara, Katsunori Tanaka | 2021-01-12 |