Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11123837 | Method of removal of sharp corners from diffuser plate | Ilyoung Richard Hong, Lai ZHAO, Jianhua Zhou, Gaku Furuta, Shinichi Kurita +1 more | 2021-09-21 |
| 10927461 | Gas diffuser support structure for reduced particle generation | Allen Lau, Lai ZHAO, Soo Young Choi | 2021-02-23 |
| 10923327 | Chamber liner | Jianheng Li, Lai ZHAO, Allen Lau, Gaku Furuta, Soo Young Choi | 2021-02-16 |
| 10883174 | Gas diffuser mounting plate for reduced particle generation | Allen Lau, Hsiang AN, Lai ZHAO, Jianhua Zhou | 2021-01-05 |