Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10883174 | Gas diffuser mounting plate for reduced particle generation | Allen Lau, Lai ZHAO, Jianhua Zhou, Robin L. Tiner | 2021-01-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10883174 | Gas diffuser mounting plate for reduced particle generation | Allen Lau, Lai ZHAO, Jianhua Zhou, Robin L. Tiner | 2021-01-05 |