RG

Richard A. Gottscho

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #289,490 of 548,734Top 55%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11209729 Vacuum-integrated hardmask processes and apparatus Jeffrey Marks, George Andrew Antonelli, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more 2021-12-28