Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183398 | Ruthenium hard mask process | Zhiying Chen, Alok Ranjan | 2021-11-23 |
| 11079682 | Methods for extreme ultraviolet (EUV) resist patterning development | Yun Han, Alok Ranjan | 2021-08-03 |