Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11060203 | Liner for epi chamber | Shu-Kwan LAU, Aaron Miller | 2021-07-13 |
| 10964512 | Semiconductor processing chamber multistage mixing apparatus and methods | Dongqing Yang, Dmitry Lubomirsky | 2021-03-30 |
| 10923386 | Processing chamber | — | 2021-02-16 |