Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177144 | Wafer spot heating with beam width modulation | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Toshiyuki Nakagawa, Nyi O. Myo +1 more | 2021-11-16 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2021-06-01 |