Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133176 | Substrate processing method, recording medium and substrate processing system | Gentaro Goshi, Takuro Masuzumi, Hiromi Kiyose, Shogo Fukui | 2021-09-28 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi +3 more | 2021-03-16 |