Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177112 | Pattern measurement device and non-transitory computer readable medium having stored therein program for executing measurement | Satoru Yamaguchi, Makoto Suzuki, Ryota Watanabe | 2021-11-16 |
| 11170969 | Electron beam observation device, electron beam observation system, and control method of electron beam observation device | Koichi Hamada, Megumi Kimura, Momoyo Enyama, Ryou YUMIBA, Makoto Sakakibara +2 more | 2021-11-09 |
| 11011346 | Electron beam device and image processing method | Koichi Hamada, Satoru Yamaguchi | 2021-05-18 |
| 10984980 | Charged particle beam device for imaging vias inside trenches | Satoru Yamaguchi, Hideki ITAI, Yasunori Takasugi, Kumiko Shimizu | 2021-04-20 |
| 10976536 | Image-forming device, and dimension measurement device | Yasunori Takasugi, Satoru Yamaguchi, Kazuyuki Hirao | 2021-04-13 |