Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211269 | Multi-object capable loadlock system | Andrew Paul Harbert, Michael C Kuchar, Nicholas Michael Bergantz, Leon Volfovski, Sivakumar Ramalingam +1 more | 2021-12-28 |
| 10943805 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Jeffrey C. Hudgens, Michael R. Rice, Nir Merry | 2021-03-09 |