Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081340 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Erika HANSEN, Taewan Kim +1 more | 2021-08-03 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Vladimir Nagorny +4 more | 2021-04-06 |