Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903048 | Substrate processing method and apparatus for controlling phase angles of harmonic signals | Yui Lun WU, Carl A. Sorensen, Suhail Anwar | 2021-01-26 |
| 10886053 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Carl A. Sorensen, John M. White | 2021-01-05 |