Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107681 | Method of fabricating semiconductor device by removing material on back side of substrate | Ji Youn Seo, Dai Hong Kim, Ik Soo Kim, Sang-Ho Rha | 2021-08-31 |
| 11098406 | Substrate support unit and deposition apparatus including the same | Il Jun Jeon, Ji Ho Uh, Je Hak Lee, Jun-Sung Lee | 2021-08-24 |
| 11049860 | Semiconductor device and method for fabricating the same | Byoung-Deog Choi | 2021-06-29 |
| 11018045 | Deposition apparatus including upper shower head and lower shower head | Ji Youn Seo, Byung-Sun Park, Sung-Jin Park, Hyun-Seok Lim, Byung Ho Chun +5 more | 2021-05-25 |
| 10950544 | Semiconductor device including gate pattern having pad region | Dong-Ik LEE, Dai Hong Kim, Se-mee Jang, Bo Ra Nam | 2021-03-16 |