Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098406 | Substrate support unit and deposition apparatus including the same | Il Jun Jeon, Je Hak Lee, Jun-Sung Lee, Ji Woon Im | 2021-08-24 |
| 11021796 | Gas injectors and wafer processing apparatuses having the same | Jong Hyun Lee, Young Kwon Kim, Woo-Jae Kim, Seung-min Ryu | 2021-06-01 |