Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098406 | Substrate support unit and deposition apparatus including the same | Ji Ho Uh, Je Hak Lee, Jun-Sung Lee, Ji Woon Im | 2021-08-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098406 | Substrate support unit and deposition apparatus including the same | Ji Ho Uh, Je Hak Lee, Jun-Sung Lee, Ji Woon Im | 2021-08-24 |