Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189508 | Purged viewport for quartz dome in epitaxy reactor | Brian H. Burrows, Janardhan Devrajan, Schubert S. Chu | 2021-11-30 |
| 10948353 | Thermal processing chamber with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more | 2021-03-16 |
| 10930530 | Methods and apparatus for wafer temperature measurement | Ala Moradian | 2021-02-23 |