Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170990 | Polysilicon liners | Krishna Nittala, Rui Cheng, Karthik Janakiraman, Praket P. Jha, Jingmei Liang | 2021-11-09 |
| 11170994 | CD dependent gap fill and conformal films | Jung Chan Lee, Praket P. Jha, Jingmei Liang, Wenhui Li | 2021-11-09 |
| 11152248 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Yong Sun, Praket P. Jha, Jung Chan Lee, Tza-Jing Gung +1 more | 2021-10-19 |