Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950477 | Ceramic heater and esc with enhanced wafer edge performance | Xing Lin, Jianhua Zhou, Zheng John Ye, Juan Carlos Rocha-Alvarez | 2021-03-16 |
| 10910227 | Bottom and side plasma tuning having closed loop control | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan +1 more | 2021-02-02 |