Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158548 | Overlay measurement using multiple wavelengths | Yuval Lamhot, Eran Amit, Einat Peled, Noga Sella, Wei-Te Cheng | 2021-10-26 |
| 11112704 | Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements | Vladimir Levinski, Amnon Manassen, Yuval Lubashevsky | 2021-09-07 |