Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099483 | Euv lithography system for dense line patterning | David M. Williamson, Stephen P. Renwick, Daniel Gene Smith, Michael Binnard | 2021-08-24 |
| 10890849 | EUV lithography system for dense line patterning | David M. Williamson, Stephen P. Renwick, Daniel Gene Smith, Michael Binnard | 2021-01-12 |