Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186911 | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same | Alfred Grill, Son V. Nguyen | 2021-11-30 |
| 11066748 | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same | Alfred Grill, Son V. Nguyen | 2021-07-20 |
| 11043494 | Structure and method for equal substrate to channel height between N and P fin-FETs | Lawrence A. Clevenger, Leigh Anne H. Clevenger, Mona A. Ebrish, Gauri Karve, Fee Li Lie +2 more | 2021-06-22 |