Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139216 | System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer | Abhinav Mathur, Kenong Wu, Eugene Shifrin | 2021-10-05 |