Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180361 | MEMS device and method for producing the same | Marc Fueldner | 2021-11-23 |
| 11161735 | Double-membrane MEMS component and production method for a double-membrane MEMS component | Johann Strasser, Alfons Dehe, Gerhard Metzger-Brueckl, Juergen Wagner | 2021-11-02 |
| 10913656 | Method for sealing an access opening to a cavity and MEMS component comprising a sealing element | Gerhard Metzger-Brueckl, Alfons Dehe, Uwe Hoeckele, Johann Strasser | 2021-02-09 |