Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11161735 | Double-membrane MEMS component and production method for a double-membrane MEMS component | Johann Strasser, Alfons Dehe, Juergen Wagner, Arnaud Walther | 2021-11-02 |
| 10913656 | Method for sealing an access opening to a cavity and MEMS component comprising a sealing element | Alfons Dehe, Uwe Hoeckele, Johann Strasser, Arnaud Walther | 2021-02-09 |