Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10913656 | Method for sealing an access opening to a cavity and MEMS component comprising a sealing element | Gerhard Metzger-Brueckl, Alfons Dehe, Johann Strasser, Arnaud Walther | 2021-02-09 |