Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187972 | Reflective mask blank, method of manufacturing reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2021-11-30 |
| 11131921 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Tsutomu Shoki, Kazuhiro Hamamoto | 2021-09-28 |
| 11003068 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki, Takahiro Onoue, Hirofumi Kozakai | 2021-05-11 |
| 10921705 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2021-02-16 |