Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device

Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device

US Patent 10921705 · Granted Feb 16, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reflective mask blank, reflective mask, and method for manufacturing semiconduct2025
Reflective mask blank, reflective mask, and method for manufacturing semiconduct2025
Reflective mask blank, reflective mask and method for manufacturing a semiconduc2025
Reflective mask blank and reflective mask2024
Reflective mask blank and reflective mask2024
Reflective mask blank, reflective mask and manufacturing method thereof, and sem2024
Reflective mask blank, reflective mask and manufacturing method thereof, and sem2024
Reflective mask blank, reflective mask, method of manufacturing reflective mask,2024
Reflective mask blank, reflective mask, method of manufacturing reflective mask,2024
Reflective mask blank, reflective mask, and method for manufacturing reflective 2024
Reflective structure, reflective mask blank, reflective mask and method of manuf2024
Reflective mask blank, reflective mask, and method for manufacturing reflective 2024