Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048159 | Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device | Tsutomu Shoki | 2021-06-29 |
| 11003068 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Tsutomu Shoki, Hirofumi Kozakai | 2021-05-11 |