Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131921 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Tsutomu Shoki, Yohei IKEBE | 2021-09-28 |
| 10996554 | Substrate with an electrically conductive film, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Takumi Kobayashi, Tatsuo Asakawa, Tsutomu Shoki | 2021-05-04 |