Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996554 | Substrate with an electrically conductive film, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tatsuo Asakawa, Tsutomu Shoki | 2021-05-04 |