Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164715 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Mario Muetzel, Antonio Casares +1 more | 2021-11-02 |
| 11087948 | Multi-beam charged particle system | Dirk Zeidler, Thomas Kemen, Christof Riedesel, Ralf Lenke | 2021-08-10 |
| 11087955 | System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination | Dirk Zeidler, Michael Schall, Michel Le Maire | 2021-08-10 |