Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087955 | System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination | Dirk Zeidler, Michael Schall, Joerg Jacobi | 2021-08-10 |