Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164715 | Charged particle beam system | Stefan Schubert, Ingo Mueller, Joerg Jacobi, Mario Muetzel, Antonio Casares +1 more | 2021-11-02 |
| 11158482 | Multi-beam particle microscope | Stefan Schubert | 2021-10-26 |
| 11087948 | Multi-beam charged particle system | Thomas Kemen, Christof Riedesel, Ralf Lenke, Joerg Jacobi | 2021-08-10 |
| 11087955 | System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination | Michael Schall, Joerg Jacobi, Michel Le Maire | 2021-08-10 |
| 11069508 | Method of imaging a 3D sample with a multi-beam particle microscope | Anna Lena Eberle | 2021-07-20 |
| 11049686 | Particle beam system and method for the particle-optical examination of an object | Stefan Schubert | 2021-06-29 |
| 10896800 | Charged particle beam system and method | Christoph Riedesel | 2021-01-19 |