Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164715 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Joerg Jacobi, Mario Muetzel +1 more | 2021-11-02 |
| 11087948 | Multi-beam charged particle system | Dirk Zeidler, Thomas Kemen, Ralf Lenke, Joerg Jacobi | 2021-08-10 |