Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009559 | Leakage current calculation method | Takuya Fukudome, Tsuyoshi Takeuchi, Koji Yokota | 2021-05-18 |
| 10896836 | Electrostatic chuck | Kenta Chito, Hidekazu Iida, Yoshiteru Nishida, Hiroyuki Takahashi, Ryoko Fujiya +1 more | 2021-01-19 |