Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198235 | Flexible mask modulation for controlling atmosphere between mask and substrate and methods of using the same | — | 2021-12-14 |
| 11145535 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Se-Hyuk Im | 2021-10-12 |
| 11040366 | Dispenser shield with adjustable aperture to improve drop placement and residual layer thickness | Logan L. Simpson, John Williamson | 2021-06-22 |
| 11043407 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Masaki Saito, Ozkan Ozturk | 2021-06-22 |
| 11034057 | Planarization process, apparatus and method of manufacturing an article | Ozkan Ozturk, Masaki Saito, Alireza Aghili, Steven C. Shackleton, Byung-Jin Choi | 2021-06-15 |
| 10996561 | Nanoimprint lithography with a six degrees-of-freedom imprint head module | Jeremy Lee Sevier, Byung-Jin Choi, Philip D. Schumaker, Mario Johannes Meissl | 2021-05-04 |
| 10895806 | Imprinting method and apparatus | Mehul N. Patel, Edward Brian Fletcher, Alireza Aghili | 2021-01-19 |