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Flexible mask modulation for controlling atmosphere between mask and substrate and methods of using the same |
— |
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Planarization process, apparatus and method of manufacturing an article |
Byung-Jin Choi, Se-Hyuk Im |
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| 11040366 |
Dispenser shield with adjustable aperture to improve drop placement and residual layer thickness |
Logan L. Simpson, John Williamson |
2021-06-22 |
| 11043407 |
Planarization process, apparatus and method of manufacturing an article |
Byung-Jin Choi, Masaki Saito, Ozkan Ozturk |
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| 11034057 |
Planarization process, apparatus and method of manufacturing an article |
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| 10996561 |
Nanoimprint lithography with a six degrees-of-freedom imprint head module |
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Imprinting method and apparatus |
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