Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043407 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Seth J. Bamesberger, Masaki Saito | 2021-06-22 |
| 11034057 | Planarization process, apparatus and method of manufacturing an article | Seth J. Bamesberger, Masaki Saito, Alireza Aghili, Steven C. Shackleton, Byung-Jin Choi | 2021-06-15 |
| 11018018 | Superstrate and methods of using the same | — | 2021-05-25 |