Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145535 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Seth J. Bamesberger | 2021-10-12 |
| 11020894 | Safe separation for nano imprinting | Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid, Mario Johannes Meissl +4 more | 2021-06-01 |